ACTIVE ACT-300AII Spin Coater (0-6000rpm, φ300mm)
| Manufaturer: | ACTIVE |
Product code
1-85-58070
Price
10,493.90 USD
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Description
- Suitable for development and evaluation using various solutions.
- Safety cover and magnet sensor for interlock are standard equipment.
- Equipped with a multistage program memory of 10 steps and 100 patterns (switchable to 50 steps and 20 patterns. Please specify when ordering).
- A one-touch connector is attached to the main body and vacuum pump side, so tube connection is easy.
- Specifications: ACT-300AII (body)
- Applicable substrate size (mm): φ5 to φ150 (Max φ6 inch, □110)
- Cup size (mm): φ300 (inner diameter φ297)
- External dimensions (mm): 350 x 450 x 325 (when the safety cover is closed)
- Power supply: 1Φ 100V-10A (AC servo motor 200W) 50/60Hz
- Rotation control speed (rpm): 0 to 6000
- Rotation accuracy (rpm): ±1
- Body exterior cover/cup material: Stainless steel electropolishing standard (Teflon coating possible)
- Weight (kg): 22
- * When using the main unit, an optional vacuum pump and sample stand are required.
- *Custom orders are available. Please contact us.
- *A centering jig is required for substrates with a diameter of 100 mm or more depending on the application. Please contact us.
- *When requesting only optional items such as a sample stand, please inform us of the serial number (S/No) of the active spin coater you are using.
- *Custom orders and additional machining are possible.
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