ACTIVE ACT-300AII Spin Coater (0-6000rpm, φ300mm)

Manufaturer:

ACTIVE

Product code

1-85-58070

Price 10,493.90 USD

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Description

Suitable for development and evaluation using various solutions.
Safety cover and magnet sensor for interlock are standard equipment.
Equipped with a multistage program memory of 10 steps and 100 patterns (switchable to 50 steps and 20 patterns. Please specify when ordering).
A one-touch connector is attached to the main body and vacuum pump side, so tube connection is easy.
Specifications: ACT-300AII (body)
Applicable substrate size (mm): φ5 to φ150 (Max φ6 inch, □110)
Cup size (mm): φ300 (inner diameter φ297)
External dimensions (mm): 350 x 450 x 325 (when the safety cover is closed)
Power supply: 1Φ 100V-10A (AC servo motor 200W) 50/60Hz
Rotation control speed (rpm): 0 to 6000
Rotation accuracy (rpm): ±1
Body exterior cover/cup material: Stainless steel electropolishing standard (Teflon coating possible)
Weight (kg): 22
* When using the main unit, an optional vacuum pump and sample stand are required.
*Custom orders are available. Please contact us.
*A centering jig is required for substrates with a diameter of 100 mm or more depending on the application. Please contact us.
*When requesting only optional items such as a sample stand, please inform us of the serial number (S/No) of the active spin coater you are using.
*Custom orders and additional machining are possible.

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ACTIVE ACT-300AII Spin Coater (0-6000rpm, φ300mm)

Description

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ACTIVE ACT-300AII Spin Coater (0-6000rpm, φ300mm)

Description

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